Key Features
- Beam energy up to 10 keV / 30 keV
- High brightness source – Schottky cathode (TFE)
- Magnetic immersion lens
- Electrostatic multipole (beam deflection & astigmatism correction)
- Switching between low current (high resolution) and high current (low resolution) mode
- Movable aperture stage (customized multiple hole strip aperture)
- Gate valve
Operation Variability
- Variable beam energy: 2–10 keV (DIGUN) / 2–30 keV (DIGUN 30)
- Divergent, collimated or convergent beam (crossover mode)
- Beam current adjustable in the range of tens of pA up to hundreds of nA (optionally up to units of μA)
Universal Application & Custom Solutions
- Inspection and analytical electron microscopes
- Lithographs and other devices
- Other DI electron optics solutions
Simple Installation & Operation
- Fast and simple gun installation or replacement
- Minimized downtime (no gun venting, pump-down and bakeout)
- Remote control
Accessories
- Control electronics including ion pump supplies
- DI control software including API
- Customized set of cables
- Other accessories
